Mr. Rogers: "Look for the Helpers. You will always find people who are helping."
As an Amazon Associate & eBay Partner: we earn from qualifying purchases

Home /
T.O.C.
Fun
FAQs
Good
Books
Ref.
Libr.
Adver-
tise
Help
Wanted
Current
Q&A's
Site 🔍
Search
finishing.com -- The Home Page of the Finishing Industry


  Thread 98/41

Plasma etch defect issues




2001

I am running a Plasma etch tool with chlorine based. The other gases used are Helium and Oxygen. I used the Plasma etch for Photomask chrome layer etching. Currently I'm facing a problem of massive chrome defect but managed to reduce them to less then 100 defect after cleaning all the chambers.

What further action can I to reduce the chrome defects? Should I adjust the RIE and ICP RF power or gasses composition? If yes where should I start first?

Azman Musa
- Singapore
publicly reply to Azman Musa

Thoroughly partition all areas where your mask can pick-up defects, is it definitely the process chamber? Consider cleaning the load-lock which can become corroded by out gassing of Cl from the resist. Check all O-rings and consider changing to chem-raz or cal raz. Partition the chamber, gas-on, no gas-on, move any internal parts which can move, final thing is to consider removing and servicing your turbo-pump.

Kevin Pears
- England
2001
publicly reply to Kevin Pears



(No "dead threads" here! If this page isn't currently on the Hotline your Q, A, or Comment will restore it)

Q, A, or Comment on THIS thread -or- Start a NEW Thread


Disclaimer: It's not possible to fully diagnose a finishing problem or the hazards of an operation via these pages. All information presented is for general reference and does not represent a professional opinion nor the policy of an author's employer. The internet is largely anonymous & unvetted; some names may be fictitious and some recommendations might be harmful.

If you are seeking a product or service related to metal finishing, please check these Directories:

Finishing
Jobshops
Capital
Equipment
Chemicals &
Consumables
Consult'g,
& Software


About/Contact  -  Privacy Policy  -  ©1995-2025 finishing.com, Pine Beach, New Jersey, USA  -  about "affil links"