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topic 7613

High Conductivity Copper Film


(2001)

We're using an acid Cu bath to plate onto a Au seed layer. We're interested in getting the highest possible electrical conductivity of the Cu film. We're currently getting values about 70% of the bulk conductivity. Is there anything to pay particular attention to in our bath to improve this? Would a different Cu bath be better for this application?

Thanks in advance for any help.

Brent Krusor
-Palo Alto, California USA



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