No passwords, no registration, no paywalls, no popups, no AI

As an Amazon Associate & eBay Partner we earn from affil links

finishing.com -- The Home Page of the Finishing Industry

Search our quarter-million Q&As

Home of the finishing HOTLINE since 1989

-----

Etching a Ta/FeCo stack on silicon

Sir,

This is Rao from IIT Bombay. I would like to etch Ta (10 nm) /FeCo (20 nm) stack which is deposited on Silicon. Can you suggest me which chemicals are better to etch this Ta/FeCo stack. I wind like to create window by removing Ta/FeCo from Ta/FeCo/Silicon. The window size is 500nm X 20 um. Kindly suggest me about better etchant solutions with composition.

Thanking you
Rao.

Rao Adari
student - Mumbai, India
November 11, 2010

Sorry! Finishing.com is temporarily Read-Only.
Ted Mooney is retiring but I have several offers to take it over.
We're working hard to make sure we find it the best new home.

Disclaimer: It's not possible to fully diagnose a finishing problem or the hazards of an operation via these pages. All information presented is for general reference and does not represent a professional opinion nor the policy of an author's employer. The internet is largely anonymous & unvetted; some names may be fictitious and some recommendations might be harmful.

If you are seeking a product or service related to metal finishing, please check these Directories: