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-----Induce Chloride on Aluminium Pad (wafer)
Can someone tell me how to effectively induce Chloride on Aluminium Pad of wafers, without being washed off by water ? Several attempts had been tried but not effective.
Attempt 1 : Salt water solution deposit on pad for 3 minutes and wipe off
Attempt 2 : 1:3 HCl deposit on pad for 3 minutes and wipe off
Attempt 3 : 1:3 HCl deposit on pad and allow it to evaporate -> bond pad etched off.
Attempt 4 : Wafers soaked into NaCl with difference ppm , 100,
1K, 10K level, washed off by DI water.
employee - Ipoh, Perak, Malaysis
April 21, 2009
A chemistry reference handbook says that aluminum chloride is soluble to very soluble in water so you are out of luck if it comes in contact with water.
If it does not, you might try blasting it with a tiny abrasive blast rig using different size salt crystals to see if you can find anything that works.
- Navarre, Florida
April 27, 2009
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