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Good adhesion material for Si substrate and Gold?




I'd like to deposit Gold on Si substrate. But, the adhesion between the Gold and Si isn't good. So, I used Ti for good adhesion. However, the problem is the Ti is hard to deposit in evaporator. Is there any other metal that substitute the Ti?

Kwang An
U. of M. - Ann Arbor
2006


I believe Ti is the most common adhesion layer for gold evaporation. I know we use Ti with Au and Si all the time in our evaporation system, with no problem. I have also heard of using chrome and then gold in an evaporator, but I have no experience with that. You might also look into nickel.

Brad Blakestad
- Boulder, Colorado, USA
2006




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