No registration or passwords; no pop-up ads -- just aloha, fun, & answers.
(as an eBay Partner & Amazon Affiliate earns from qualifying purchases).
Where the
world gathers for metal finishing
Q&As since 1989
Titanium Dry Etching
-----
Dear colleagues,
I would like to etch a thin (~30 nm) Titanium layer using CF4 or SF6
(without Cl's). Is somebody know where can I find the right parameters (base and gas pressures, power, oxygen, etch rate)?
Thank you,
David Katz
NJIT - Newark, New Jersey
2006
Disclaimer: It's not possible to fully diagnose a finishing problem or the hazards of an operation via these pages. All information presented is for general reference and does not represent a professional opinion nor the policy of an author's employer. The internet is largely anonymous & unvetted; some names may be fictitious and some recommendations might be harmful.
If you are seeking a product or service related to metal finishing, please check these Directories: