No passwords, no registration, no paywalls, no popups, no AI

As an Amazon Associate & eBay Partner we earn from affil links

finishing.com -- The Home Page of the Finishing Industry

Search our quarter-million Q&As

Home of the finishing HOTLINE since 1989

Titanium Dry Etching

-----

Dear colleagues,

I would like to etch a thin (~30 nm) Titanium layer using CF4 or SF6 (without Cl's). Is somebody know where can I find the right parameters (base and gas pressures, power, oxygen, etch rate)?

Thank you,

David Katz
NJIT - Newark, New Jersey
2006

Sorry! Finishing.com is temporarily Read-Only.
Ted Mooney is retiring but I have several offers to take it over.
We're working hard to make sure we find it the best new home.

Disclaimer: It's not possible to fully diagnose a finishing problem or the hazards of an operation via these pages. All information presented is for general reference and does not represent a professional opinion nor the policy of an author's employer. The internet is largely anonymous & unvetted; some names may be fictitious and some recommendations might be harmful.

If you are seeking a product or service related to metal finishing, please check these Directories: