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PVD Zirconium Nitride

I need to deposit 2 to 5 microns of Zirconium Nitride under PVD, but I'm only able to get 1/2 micron. Then the fixturing and chamber gets isolated and the targets (cathodes) no longer spark.

Ignacio Castro
Cutting tools - Roseville, California, USA
2006

My guess is that your chamber pressure is not very good or that your parts are outgassing, so you are depositing zirconium oxide, not nitride. ZrN is a good electrical conductor, ZrO a very good insulator.

Jim Treglio - scwineryreview.com
PVD Consultant & Wine Lover
San Diego, California
2006

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