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How to convert to CO2 concentration as the resistivity of DI water known
We have a question to calculate the CO2 dosage in order to control DI water resistivity. As we know, the resistivity of DI water would cause the corrosion along routine, but sometime, this will be used for cleaning in micro electronic wafer fabrication. the certain CO2 content in DI water will arise PH increasing. In the actual operation, we monitor the input DI water resistivity by injecting some dosage CO2 into system. How do we know CO2 dosage to maintain the constant resistivity inside DI water?
Tony Xue- Singapore
2006
publicly reply to Tony Xue
"We have a question to calculate the CO2 dosage in order to control DI water resistivity. As we know, the resistivity of DI water would cause the corrosion along routine, but sometime, this will be used for cleaning in micro electronic wafer fabrication. the certain CO2 content in DI water will arise PH increasing. In the actual operation, we monitor the input DI water resistivity by injecting some dosage CO2 into system. How do we know CO2 dosage to maintain the constant resistivity inside DI water?
Tony Xue
- Singapore"
Reposted
Jason Indiongco -
- Manila, Philippines
June 6, 2011
publicly reply to Jason Christopher Indiongco
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