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-----Fluorine retention on anodized aluminum surfaces
Is there any literature that would compare the fluorine retention of both anodized and un anodized aluminum surfaces in a vacuum. In the semiconductor industry fluorinated gases are used under vacuum to clean previously deposited materials. Post clean, some vacuum chambers seem to retain a larger fluorine signal for longer periods. There are several versions of chamber some having more anodized hardware than others. Any info would be helpful.
James N.PintoSemiconductor Manufacturing - Burlington, Vt, USA
2005
2005
Good luck finding specialized data like that. The equipment manufacturers usually do not disclose a lot of info that they pay handsomely to research.
If it helps..
Anodized CVD components typically are .0020" hot water sealed, and etchers are .0020 with a nickel acetate seal.
I would suspect if the components were not sealed (properly) you might see some retention/outgasing. Unsealed, the coatings will adsorb as well absorb.
Qualtek Manufacturing - Colorado Springs, Colorado, USA
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