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Roughness of Al and stainless steel finished by EP

Hello,

I would like to know about the roughness (in Angstrom) of stainless steel and aluminium surfaces finished by various electro-polishing methods. Besides, is it possible to electro-polish only the inside surface of a CVD chamber (Al or a SS316L), which is typically of >12" in diameter?

Thank you for a quick reply in advance. Please send me advertising materials of your services to the address below.

Byungchun Yang
Semiconductor process equipment - Cupertino, California, USA
2005

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Final surface finish after electropolishing depends on the surface finish before electropolishing. In general, in terms of Ra, roughness will be reduced by about half, ie, a 32 Ra prior to electropolish will prduce about 16 Ra after electropolish. Similar surface roughness can be achieved by mechanical means, but on a micro level, under examination by SEM or sinilar methods, the electropolished surface will be much cleaner and smoother. Yes, it is possible to polish only the interior of a vessel.

Jeffrey Holmes, CEF
Spartanburg, South Carolina
2005