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Want to etch SiO2 but not ZnO

Hi,

My substrate contains an array of SiO2 and ZnO. I wish to etch only the SiO2. After using concentrated HF, both SiO2 and ZnO disapeared. Is HF an etchant of ZnO as well? Can you suggest other suitable etchants?

Gloria Cheng
student - Singapore
2004

Use Buffered Oxide Etch. (BOE) The solution consists of Ammonium fluoride, and Hydrofluoric acid.

Ted Eisenbach
- Mountain Top, Pennsylvania, USA
2004

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