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Etching Tantalum

2004

I am having problems with etching Tantalum using 1:1 mixture of 0.5M EDTA and 30% Hydrogen peroxide (CMOS grade). I am performing this etch at 60 degree C. But still, I see my Tantalum film (400 A thickness) intact. Could anyone help me?

Thanks,

Arvind Narayanan
Student - Blacksburg, Virginia

You can visit http://kaker.com/etch/java/ website!

Goran Budija
- Cerovski vrh Croatia
2004

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