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"Anodizing of aluminum thinfilm deposit"



1998

Is it possible to anodize a thinfilm that has been deposited onto an insulator? For example, 5000 angstroms of Al on a quartz plate.

Troy Reichard
^


1998

Troy,

Thin films of aluminum can be anidozed using a barrier anodization technique where the thickness of the anodized layer is proportional to the applied voltage. It is very important that there not be any tramp chlorine ions in the electrolyte. This type of anodization is used to make thin film capacitors.

Donald M. Mattox
Society of Vacuum Coaters
Albuquerque, New Mexico

^

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