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Tantalum wet etch

I need to do Tantalum wet etch with high selectivity toward Ni-Fe compound. Can anyone help me to find a wet chemistry for it ?

Kate Son
- San Jose, California, USA
2003

Who, what, when, where, why? You'll be more likely to get good answers, rather than impractical ones if you take the time to explain what you're actually trying to do.

Ted Mooney, P.E.
Striving to live Aloha
finishing.com - Pine Beach, New Jersey
2003

I've used 1:1 1M EDTA:H202 at 60C to remove Ta in the presence of Ni-Fe. It etches quite slow (~1000A/hr), so be patient.

David Arnold
Georgia Tech - Atlanta, Georgia, USA
2003

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