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topic 1927

Minimum radius to prevent flaking from anodized corners?


I was assigned the task of optimizing the design of a 12" diameter vacuum chuck used in the semiconducter industry. The chuck has vacuun grooves on the top surface and it is to be hard anodized and lapped very flat.

One problem I need to solve is how to finish the vacuum groove corners. If they require a radius, what is the minimum radius. We have experienced flaking of hard anodize particulates from some plated edges. We must end up with a mirror finish surface from which no particulates can emerge.

Any suggestions on this matter will be greatly appreciated even if they come from a competitor.

Dan Jacob
- Fremont, California


Sorry, I'm not familiar with this problem in anodizing, although a razor-sharp corner on just about any material would seem to pose a similar potential problem. You've done this before, so probably don't need the warning, but remember the dimensional changes when anodizing: for each thousandth of anodizing you specify, the dimensions of the surface are only going to grow by about a half a thousandth because of the aluminum consumed in forming the aluminum oxide coating.

Ted Mooney,
Teds signature
Ted Mooney, P.E.
Pine Beach, New Jersey

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