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topic 18553

Plating of Silicon Wafers


I have to do a platinum plating on a silicon wafer. The wafer has several areas, in which a mesh is present. The pores of this mesh are about 5 to 10 micron in diameter and I will need to have the plating cover the inside of the pores. Any suggestions for methods and procedures will be greatly appreciated.

Lars Smith
- Olympia, Washington


I don't quite picture what you are describing, but in the meanwhile I would say that your feature size is not scary. See letter 2941 for an example of plating to very tight tolerances.

Ted Mooney, Teds signature
Ted Mooney, P.E.
Pine Beach, New Jersey
Striving to live "Aloha"

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