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Plating of Silicon Wafers





I have to do a platinum plating on a silicon wafer. The wafer has several areas, in which a mesh is present. The pores of this mesh are about 5 to 10 micron in diameter and I will need to have the plating cover the inside of the pores. Any suggestions for methods and procedures will be greatly appreciated.

Lars Smith
- Olympia, Washington
2002



I don't quite picture what you are describing, but in the meanwhile I would say that your feature size is not scary. See letter 2941 for an example of plating to very tight tolerances.

Ted Mooney, finishing.com
Ted Mooney, P.E.
Striving to live Aloha
finishing.com - Pine Beach, New Jersey
2002




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