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Plating of Silicon Wafers
I have to do a platinum plating on a silicon wafer. The wafer has several areas, in which a mesh is present. The pores of this mesh are about 5 to 10 micron in diameter and I will need to have the plating cover the inside of the pores. Any suggestions for methods and procedures will be greatly appreciated.
- Olympia, Washington
I don't quite picture what you are describing, but in the meanwhile I would say that your feature size is not scary. See letter 2941 for an example of plating to very tight tolerances.
Ted Mooney, P.E.
Pine Beach, New Jersey
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