A website for Serious Education, promoting Aloha,
& the most FUN you can have in metal finishing
on this site FORUM
Selective Etchant for Ta
I'm trying to etch Ta. The etchant I'm using (HF:HNO3:HCl or lactic acid:HF:HNO3). My film stack contains Cu and SiO2, but either of the etchants do not have selectivity for Ta alone. Both Cu and SiO2 are etched as well. Is there an etchant available that etches only the Ta and leave the Cu and SiO2 alone?
Strong alkali or solutions that contain free sulfur trioxide, but that will probably get the copper too.
Falls Township, Pennsylvania
This public forum has 60,000 threads. If you have a question in mind which seems off topic to this thread, you might prefer to Search the Site
Disclaimer: It's not possible to diagnose a finishing problem or the hazards of an operation via these pages. All information presented is for general reference and does not represent a professional opinion nor the policy of an author's employer. The internet is largely anonymous & unvetted; some names may be fictitious and some recommendations may be deliberately harmful.
If you need a product/service, please check these Directories:
JobshopsCapital Equip. & Install'nChemicals & Consumables
Consult'g, Train'g, SoftwareEnvironmental ComplianceTesting Svcs. & Devices
How Google uses data when you visit this site.