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DI water resistivity
What: DI water resistivity for wafer wash/saw
When: during wash or saw
Where: semiconductor industry
Why: still confused about the right resistivity value some says below 1 Mohm and others say around 18meg.
I'm also new in the semiconductor industry and am assigned at wafer saw. What I know is that the 18 M-ohm requirement is a measure of the purity of the DI water to be used during saw and/or wash. As for the
1 M-ohm, an additional equipment is set-up to reduce the resistivity against ESD and this is kept below 1 M-ohm.
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