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Maximum current density, thin film

2000

For LSI layout calculations I am looking for the maximum current density of thin film aluminum, chromium and gold.

I guess it is a Foundry parameter but I need some rough number.

Could you help?

Raffy Goshen
Optun Ltd. - MATAM, Haifa

The current density is limited by electromigration effects and is limited to the order of mega-amp/cm.sq. cross-section area of the interconnect. These standards have been established in the industry and should be available in semiconductor electronics literature or even Journal of Electrochemical Society.

Mandar Sunthankar
- Fort Collins, Colorado
2000

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