Maximum current density, thin film(2000)
For LSI layout calculations I am looking for the maximum current density of thin film aluminum, chromium and gold.
I guess it is a Foundry parameter but I need some rough number.
Could you help?Raffy Goshen
Optun Ltd. - MATAM, Haifa
The current density is limited by electromigration effects and is limited to the order of mega-amp/cm.sq. cross-section area of the interconnect. These standards have been established in the industry and should be available in semiconductor electronics literature or even Journal of Electrochemical Society.Mandar Sunthankar
- Fort Collins, Colorado
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