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Platinum vs. chrome plating for PECVD electrodes

March 16, 2015

Q. I want to do some diamond plating cvd and am trying to find electrodes for a DC plasma chamber that wont suck up the carbon and won't contaminate the coating. This needs to run at about 1000 °C and at >=0.1 torr range. I'm a little worried about the vapor pressure and carbon ions etching the electrodes contaminating the plasma field. Currently my two front runners are platinized titanium or chrome plated titanium. Anyone have any suggestions or resources where I could look up on it? Or better yet buy exactly what I need?

Charles scott
- wpb Florida usa

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