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topic 54433

How to reduce the resistance of PVD films?

February 24, 2010


I used Cr target to get black PVD films (CrC) on SUS, and test the resistance of film by 4-probe system. The resistance of part is over 100 ohm, while my costumer wants it to be below 15 ohm. I have no idea on how to reduce it? Does it work if using CrC target instead of Cr target?

Any advice is appreciated. Thanks in advance.

Wayne Xue
Engineer - Guangzhou, China

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