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Purpose of bias in PVD process

What is the main purpose of bias in PVD chambers like aluminium, titanium nitride. Explain

Padhukumar Padma
semiconductor - Singapore
March 3, 2009

March 4, 2009

Hi, Padhukumar. Everyone hates 'flash card' quizzes. Please explain your own situation in a way that we readers may learn something from you. Thanks!

Regards,

Ted Mooney, P.E.
Striving to live Aloha
finishing.com - Pine Beach, New Jersey
Ted can be retained for immediate
answers or long term project help

March 20, 2009

Bias serves several purposes. Some of them are

1. Substrate cleaning
2. Substrate heating
3. Provide mobility to the atoms/ions being deposited so that dense and void free films are deposited
4. Control the crystalline orientation or phase.

I am sure our learned readers can expand and elaborate.

H.R. Prabhakara - Consultant
Bangalore Plasmatek - Bangalore Karnataka India

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