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TiO2 etching

June 26, 2008

I need to chemically etch TiO2 coatings on Si substrate in cross section.
please suggest HF free etchant.
Thanks

Yasir Joya
student - Manchester, UK

If all literature searches fail, try contacting CERAM at Stoke on Trent

Trevor Crichton
R&D practical scientist
Chesham, Bucks, UK
July 8, 2008

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