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Seeking very slow wet etching of Ti

April 21, 2008

Dear Researchers and Professors,
I would like to etch Ti (Around 5 to 10nm thickness) for my patterning work. I am looking for very slow etching rate. Please suggest me some suitable solution.

Thank you for kind help in advance.

Ramesh Vadivelu
Student - Tokyo, Japan

A 50-50 mixture of DI water, Hydrogen Peroxide to start with. Slowly add Ammonium Hydroxide till you get the etching rate you'd like.

Caution, this mixture is extremely exothermic, and will react violently once it becomes saturated with titanium, and reaches temps over 150F, so I would do this on a small scale unless you have a means to control the temperature.

Marc Green
anodizer - Boise, Idaho
April 25, 2008

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