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Electropolishing of Tungsten Surface

2006

We are interested in the electropolishing of Tungsten surface, which will be used in nanofabrication purpose.
After electropolishing, the tungsten surface will be optically flat, smooth (RMS roughness of about 2-5 nm over an area of 100 microns square). Kindly tell me the condition of electropolishing to achieve this.
Conditions : electrolytic solution (composition and concentration),condition for voltage limited or current limited, type of cathode, temperature, current density and duration of electropolishing, any pretreatment or post treatment required.

Dr. Ujjal Kumar Sur
IAMS, Academia Sinica - Taipei, Taiwan

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