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Ceramic coating for PVD chamber walls

Who knows the ceramic coating material for the application as following : The ceramic coating apply on the chamber wall of PVD equipment to prevent the sputtered material strongly adhere on the chamber wall that will let the chamber wall cleaning more easily at equipment each regular cleaning or maintenance cycle and the applied ceramic coating can't any reaction or effect the PVD deposition film. Thanks in advance.

Robert Hsiao
- Taichung, Taiwan R.O.C.


Most all coating systems search for what you ask. As a result, there are a number of approaches being used and more being tried.

The normal here is not ceramic, but more often based on boron nitride or a form of graphite. The success depends very much on your needs and skill in application. Ceramics are used where particulate is critical such as memory and semiconductor applications.

One of the industries working on this is optical disc coaters. A combination of many cycles, over 50,000, and the gold and silver metals involved in some products.

We are a target company, and see this activity many times.We do not sell the release materials, but would help you where possible.

Alan plaisted
- biddeford, Maine

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