Electroless plating on silicon wafer

hello

My name is Roberto Zepeda from Guadalajara , Mexico.

Now, we have a vacuum deposition process with Al,Ti,Ni,Au,A and Ge .

We are making Thyristors from silicon wafer. My question is how can I get information about electroless plating on silicon wafer to be able to replace our current vacuum process? Now we are exploring feasibility phase to be able to do a analysis benefit-cost to replace this process.

Thank you for your support

Best regards,
Saludos,
Roberto

Electroless nickel plating has been carried out on silicon wafers by several companies for several years. SEMATECH are your best option for more details on the various equipment and processes available.