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EDX for Thickness Measurement
My I know the equation use to measure thickness using EDX. What are the parameters involved.
Azrul Faizal
Texas Instruments - Malaysia
2005
"My I know the equation use to measure thickness using EDX. What are the parameters involved."
By EDX are you referring to Energy Dispersive X-Ray? If so I'm not sure what equation you're looking for. Parameters for EDXRF would be the element(s) of the layer(s) of interest, and the substrate composition.
Jeff Marten
Meridian Analytical - Colorado Springs, Colorado, USA
2005
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