"What is the suitable (minimum) temperature for PVD TiNitride ?"
I would like to know what is the best temperature inside the chamber of PVD Titanium Nitride , and what will happen if the inside temperature is lower than the minimum limit.
One more question , when I turn on heater and temp. rised up more than 120 °C , inside pressure slowly increased continuously , if I turned the heater off and wait around 30 sec. the inside pressure will decreased slowly again.
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