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Etchant for Cu, Cr and epoxy

2004

Hello, everybody,

I am looking for an etchant for Cu and Cr for my sample. My sample structure is Cu(1um)/Cr(20nm)/Cured epoxy(4um)/Si wafer. I heard that Cupric (or Ferroic) chloride or Ammonium persulphate would work for Cu and Cr7 for Cr, but I am not sure if any of these etchants would not harm my cured epoxy layer. If possible, the usual, optimum concentration(and etch rate) for etchants would be very valuable to me.

Your information would be highly appreciated.

Taeyun Kim
NC State University - Raleigh, North Carolina

The epoxy chemical resistance is extremely dependent on the vendor and specific product. I have not seen an epoxy succumb to the conditions that etch Cu and Cr, but yours surely would not be the first.

Jeff Andle
- Westbrook, ME, USA
2004

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