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Anisotropic etching of aluminum
I am a student working on the fabrication of a MEMS pressure sensor. I looking for a way to perform anisotropic etching of Aluminum. What etchant can be used?
Sylvia Ziegler
student - Carmel, Indiana, US
2004
Try reactive Ion etching with BCl3, SiCl4,Cl2, N2 at 15 mTorr You should find exact data by searching the web.
Regards,
Marcus Hahn
- Switzerland
2004
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