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Ti-O-N phase diagram

I am making TiN and TiO2 thin films by PVD. Either through the oxidation of TiN in air/oxygen at different temperatures or by doing nitrogen into TiO2, I hope to produce TiO2-xNx thin films. Can anyone refer me to a source of ternary Ti-O-N phase diagram if it exists?

Annie Wu
- Champaign, Illinois, USA
2003

If the ternary phase diagram exists in a reference book, then it will be part of the Handbook of Ternary Alloy Phase Diagrams (10 Volume Set) from ASM International. You should be able to view this at the Grainger Engineering Library Information Center on-campus. You should also perform a journal search (Journal of Phase Equilibria, etc.) to see if there has been any recent revisions. Again, you can do this at GELIC.

Toby Padfield
- Troy, Michigan USA
2003

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