No popups, no spam.
Folks helping folks with
respect.  You'll like it.
finishing.com -- The Home Page of the Finishing Industry
  HomeFAQsBooksHelpWantedAdvertiseContactForum Letter 9693

The finishing.com Hotline: Serious Education ... plus the most fun you can have in metal finishing. Ted Mooney, Webmaster

Oxide Film By PVD Technology




+

Is it possible to produce a oxide film of titanium, zirconium and aluminium, such as titania, zirconia and alumina respectively, by PVD technology? If it can be, what is the reactive gas? If someone know, please let me know.

Thank you very much for your help.

David Koo
- China


+

It is possible to deposit oxides of titanium, zirconium, and aluminum by PVD, but not easy. The problem is that the one tends to oxidize the deposition system as well. If sputtering, the rate of deposition is dramatically lower if the target gets oxidized. Northwestern University has been looking at aluminum oxide deposition using a pulsed bias on the sputter target. In cathodic arc deposition, oxide formation on the anode causes the arc to extinguish. We've found a way to block the oxygen from the anode and deposited erbium oxide. Some work has been done on oxide deposition using electron beam evaporation at both Fraunhofer in Germany (aluminum oxide) and at Penn State (zirconium oxide). In fact, there is an item in the latest issue of Advanced Materials and Processes (ASM International journal) on the Penn State work.

treglio portrait
Jim Treglio
American Faucet & Coatings Corporation

Vista, California



+

The other PVD possibility is using AC magnetron sputtering. This method does not have the oxidizing anode problem that the other methods have. You can use this method with a plasma emission monitoring system to create very reproducible, high deposition rate films.

Usually the reactive gas is oxygen.


John Davis
- Berthoud, Colorado, USA

ADD a Q or A to THIS thread START a NEW THREADView This Week's HOT TOPICS

Disclaimer: It is not possible to diagnose a finishing problem or the hazards of an operation via these pages. All information presented is for general reference and does not represent a professional opinion nor the policy of an author's employer. The internet is largely anonymous; some names may be fictitious and some recommendations may be deliberately harmful.

  If you need a product/service, please check these Directories:

JobshopsCapital Equip. & Install'nChemicals & Consumables Consult'g, Train'g, SoftwareEnvironmental ComplianceTesting Svcs. & DevicesUsed & Surplus


©1995-2016 finishing.com     -    Privacy    -    Search
How Google uses data when you visit this site.