Lift-off for Ti-Al-SiO2

+++++++

For my R&D task I need to develop the lift-off process: on glass substrate with titanium mask I depose(E-beam deposition) Al(2500ang) and SiO2(5000ang). After deposition Al-SiO2 i have Al-SiO2 pattern on glass and Ti-Al-SiO2 on the remained surface. What removing(Lift-off) process for Ti-Al-SiO2?

Violet Grabstain
- Israel