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Lift-off for Ti-Al-SiO2

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For my R&D task I need to develop the lift-off process: on glass substrate with titanium mask I depose(E-beam deposition) Al (2500 ang) and SiO2 (5000 ang). After deposition Al-SiO2 I have Al-SiO2 pattern on glass and Ti-Al-SiO2 on the remained surface. What removing(Lift-off) process for Ti-Al-SiO2?

Violet Grabstain
- Israel

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