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What is the suitable (minimum) temperature for PVD TiNitride ?

I would like to know what is the best temperature inside the chamber of PVD Titanium Nitride , and what will happen if the inside temperature is lower than the minimum limit.
One more question , when I turn on heater and temp. rised up more than 120 °C , inside pressure slowly increased continuously , if I turned the heater off and wait around 30 sec. the inside pressure will decreased slowly again.

Pongthep Vitidladda
Poranunt - Bangkok, Thailand
2005

A good deposition temperature for TiN by PVD is 450 Centigrade. You're a bit on the low side.

Jim Treglio - scwineryreview.com
PVD Consultant & Wine Lover - San Diego,
California
2005

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