Aloha, fun & authoritative answers -- no cost, no passwords, no popups
(as an eBay Partner & Amazon Affiliate we earn from qualifying purchases)

Metal finishing Q&As since 1989

-----

Fluorine retention on anodized aluminum surfaces

Is there any literature that would compare the fluorine retention of both anodized and un anodized aluminum surfaces in a vacuum. In the semiconductor industry fluorinated gases are used under vacuum to clean previously deposited materials. Post clean, some vacuum chambers seem to retain a larger fluorine signal for longer periods. There are several versions of chamber some having more anodized hardware than others. Any info would be helpful.

James N.Pinto
Semiconductor Manufacturing - Burlington, Vt, USA
2005

2005

Good luck finding specialized data like that. The equipment manufacturers usually do not disclose a lot of info that they pay handsomely to research.

If it helps..

Anodized CVD components typically are .0020" hot water sealed, and etchers are .0020 with a nickel acetate seal.

I would suspect if the components were not sealed (properly) you might see some retention/outgasing. Unsealed, the coatings will adsorb as well absorb.

Willie Alexander
Qualtek Manufacturing - Colorado Springs, Colorado, USA

(No "dead threads" here! If this page isn't currently on the Hotline your Q, A, or Comment will restore it)

Q, A, or Comment on THIS thread -or- Start a NEW Thread

Disclaimer: It's not possible to fully diagnose a finishing problem or the hazards of an operation via these pages. All information presented is for general reference and does not represent a professional opinion nor the policy of an author's employer. The internet is largely anonymous & unvetted; some names may be fictitious and some recommendations might be harmful.

If you are seeking a product or service related to metal finishing, please check these Directories: