Letter 14079

Thin film coating of a small inside diameter  

 

I would like to know if it is possible to deposition coat an inside diameter of (1.6mm) with propylene gas. This substrate is 13mm long. I have an 800 watt 13.56 Mhz power supply and two mechanical pumps, one at each end of a glass tube reactor. I can cook them, I can etch them, but I haven't been able to coat them. I thought with a pressure delta from one end to the other I could establish plasma flow and by restricting the flow through the substrate I would be able to get a coating. I have tried internal and external filaments. (induction coil). I can form a low power plasma and coat the glass tube with propylene, but as soon as I introduce the substrate I get plasma on both sides, but not inside.

Thanks in advance for all replies.

Robert L Gillooly
Atrium Medical Corp. - Hudson, New Hampshire

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