Letter 35080

Fluorine retention on anodized aluminum surfaces [Vermont] 

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Is there any literature that would compare the fluorine retention of both anodized and un anodized aluminum surfaces in a vacuum. In the semiconductor industry fluorinated gases are used under vacuum to clean previously deposited materials. Post clean, some vacuum chambers seem to retain a larger fluorine signal for longer periods. There are several versions of chamber some having more anodized hardware than others. Any info would be helpful.

James N.Pinto
Semiconductor Manufacturing - Burlington, Vt, USA

Good luck finding specialized data like that. The equipment manufacturers usually do not disclose a lot of info that they pay handsomely to research.

If it helps..

Anodized CVD components typically are .0020" hot water sealed, and etchers are .0020 with a nickel acetate seal.

I would suspect if the components were not sealed (properly) you might see some retention/outgasing. Unsealed, the coatings will adsorb as well absorb.

Willie Alexander
Qualtek Manufacturing - Colorado Springs, CO, USA

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