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Letter 35080 Fluorine retention on anodized aluminum surfaces [Vermont]+++++ Is there any literature that would compare the fluorine retention of both anodized and un anodized aluminum surfaces in a vacuum. In the semiconductor industry fluorinated gases are used under vacuum to clean previously deposited materials. Post clean, some vacuum chambers seem to retain a larger fluorine signal for longer periods. There are several versions of chamber some having more anodized hardware than others. Any info would be helpful. James N.Pinto
+++++ Good luck finding specialized data like that. The equipment
manufacturers usually do not disclose a lot of info that they pay
handsomely to research. Willie Alexander
Dear Reader: please choose what you want to do--
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