Letter 34053

Need help with Titanium Nitride TiN coatings  

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I am trying to coat a glass or silicon substrate with Titanium Nitrate. Is it possible to evaporate Titanium in a let's say 10^-5 or less mbar Nitrogen atmosphere in order to get a nice thin layer of TiN on my substrate? Has anybody done that before?

Andrei Honciuc
UofA - Tuscaloosa, Alabama

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