Letter 33034

Want to etch SiO2 but not ZnO [Singapore]  

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Hi,

My substrate contains an array of SiO2 and ZnO. i wish to etch only the SiO2. After using concentrated HF, both SiO2 and ZnO disapeared. Is HF an etchant of ZnO as well? Can u suggest other suitable etchants?

Gloria Cheng
student - Singapore

Use Buffered Oxide Etch. (BOE) The solution consists of Ammonium Flouride, and Hydroflouric acid.

Ted Eisenbach
- Mountain Top, PA, USA

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