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Letter 30002
Electroplating gold onto sputtered
chromium thinfilms
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My name is Ronan O Reilly and I am a postgraduate student at the
Institute of Technology Tallaght. I am trying to fabricate
micro-sensors using microfabrication techniques but because of the
price of gold sputtering targets. I am attempting to electroplate
gold onto a 20 nm thick sputtered chromium thinfilm. I am wondering
has anybody attempted this before and if so have they any advice.
Ronan O 
student - Dublin, Leinster, Ireland
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The very thin chromium will have a tenacious oxide layer on it
that will be difficult to remove without ruining the thin metal
layer. You will be better off using vacuum cleaning techniques and
then sputter deposition.
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Trevor Crichton
R&D practical scientist - UK
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