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RF sputtering-damage to substrate surface

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Metal coating by RF Magnetran sputtering on thin polymer film (typically 5nm) adsorbed semicondutor surface damages the polymer film and expected electronic property of the adsorbed film is lost. How can we circumvent this problem. We typically use 5mT Ar back pressure during sputtering.

Thanks,

Veluchamy P
Solar cell manufacturing - Toledo, OH, USA

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