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Letter 20006
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Robert H Probert Editor's
note: |
I hope you have found an answer to your problem, since it has been over a year. But I was reading and I have the answer. Your problem is a very common phenomenon in the semiconductor industry. Even though they use DI water in their process they have to inject CO2 to bring the resistivity of water down. This way the DI water is not corrosive and will not harm your metallization. This problem of metal etch will cause reliability problem for the device and potentially bonding problems.
Hope this helps.
Eric Prinz
- Morgan Hill, CA
I am looking for topics on corrosion of aluminum copper leads with TiN in DI water. This is a problem during the water rinse after solvent clean. In fact I am looking for information of this affect with pH of DI water.
Allen Page
Semiconductor - Richardson, Texas

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