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Letter 16029
Need wet etchant for AlN on AlGaN
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I am not sure if this is the right place for my question, but
maybe you can point me in the right direction. I am a physics
student, studying semiconductors made of AlGaN. To protect the
samples during the preparation process and high temperature anneal
(1350 C) there is an AlN encapsulant. I need to remove the AlN
without damaging the AlGaN. Can you recommend a wet selective
etchant?
Thank you for your time.
Beth Chitwood
- Dayton, Ohio, USA
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