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Need wet etchant for AlN on AlGaN

I am not sure if this is the right place for my question, but maybe you can point me in the right direction. I am a physics student, studying semiconductors made of AlGaN. To protect the samples during the preparation process and high temperature anneal (1350 C) there is an AlN encapsulant. I need to remove the AlN without damaging the AlGaN. Can you recommend a wet selective etchant?

Thank you for your time.

Beth Chitwood
- Dayton, Ohio

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