Letter 16029

Need wet etchant for AlN on AlGaN [Ohio] 

++

I am not sure if this is the right place for my question, but maybe you can point me in the right direction. I am a physics student, studying semiconductors made of AlGaN. To protect the samples during the preparation process and high temperature anneal (1350 C) there is an AlN encapsulant. I need to remove the AlN without damaging the AlGaN. Can you recommend a wet selective etchant?

Thank you for your time.

Beth Chitwood
- Dayton, Ohio, USA

I want to post a question or inquiry of my own.

 

I want to answer or follow-up on this question publicly (in non-commercial fashion).

 

I am a supporting advertiser and want to reach the inquirer privately.